Solvay Same Performance Perfluoropolyether Oil 25/6 Vacuum Pump Oil Perfluoropolyether Lubricant
YBS-1303
High vacuum fluoroether oil is one of the most important application areas of perfluoropolyether (PFPE). In the molecular structure of PFPE, there are F and O atoms bonded to the C-C main bond. These two atoms have strong electronegativity, so they have good chemical stability, thermal stability and excellent physical properties. Compared with chlorofluorocarbon lubricants, perfluoropolyether lubricants have a wider range of uses. At the same time, they do not have the disadvantages of hydrofluorocarbons that are easy to evaporate at high temperatures and become sticky and thick at low temperatures. Because there is no hydrogen in its molecules, the equipment will not be corroded by the pressure of the lubricant during use.
Integrated circuit plasma etching is carried out under vacuum conditions, and a mechanical vacuum pump must be used. Due to the presence of corrosive gases in the system, if mineral vacuum pump oil is used, it will deteriorate quickly. Perfluoropolyether has special chemical inertness and excellent evaporation performance, and has been widely used as vacuum pump oil for integrated circuit plasma etching.
